Abd Rahman M, Ahmad A, Hashim Z, Muhamad M, Budi E. IMPACT OF TaN/Ta BILAYER ON THE BULK RESISTIVITY OF COPPER LAYER AT VARIOUS SELF-ANNEALING TIME. JAMT [Internet]. 31Dec.2019 [cited 3Jul.2024];13(3). Available from: https://jamt.utem.edu.my/jamt/article/view/5738