Ramlan, S., M.A. Shri Abdul Aziz, M.H.F. Md Fauadi, and M.R. Muhammad. “Experimental Study on Chemical Mechanical Planarization Process by Manufacturing Automated System”. Journal of Advanced Manufacturing Technology (JAMT) 12, no. 1(2) (1): 313-326. Accessed March 29, 2024. https://jamt.utem.edu.my/jamt/article/view/4289.