Deraman, M., Z. Ebrahim, G. Omar, W. Hassan, A. Chik, and Z. Darmawan. “MODEL OF RULE PARAMETER CREATION FOR WAFER SCRAP PREVENTION IN THE APPLIED MATERIALS CENTURA 5200 METAL ETCHER PROCESS”. Journal of Advanced Manufacturing Technology (JAMT), Vol. 17, no. 3, Dec. 2023, https://jamt.utem.edu.my/jamt/article/view/6587.