Ramlan, S., Md Fauadi, M., Razali, N. and Hao, X. (2021) “AGENT-BASED CHEMICAL MECHANICAL PLANARIZATION QUALIFICATION FOR SEMICONDUCTOR WAFER FABRICATION”, Journal of Advanced Manufacturing Technology (JAMT), 15(3). Available at: https://jamt.utem.edu.my/jamt/article/view/6219 (Accessed: 12June2024).