Ramlan, S., Shri Abdul Aziz, M., Md Fauadi, M. and Muhammad, M. (1) “Experimental Study on Chemical Mechanical Planarization Process by Manufacturing Automated System”, Journal of Advanced Manufacturing Technology (JAMT), 12(1(2), pp. 313-326. Available at: https://jamt.utem.edu.my/jamt/article/view/4289 (Accessed: 26April2024).